Nanofabrication and Microfabrication
Nanofabrication and Microfabrication of Functional Surfaces Nanofabrication/Microfabrication comprises the use of a set of manufacturing tools based on photolithographic techniques commonly used for making IC or VLSI in the electronics industry. Nanofabrication/Microfabrication is also common key technology in the promising new fields such as MEMS (microelectro-mechannical systems), μTAS (micro total analytical systems), and μFLUMS (micro fluidics and molecules) […]