Posts Tagged: Functional Surface structures verification

Surface Structures Fabrication and Verification

A fine (micro- or nano-patterned) Si-based mold is fabricated by a conventional VLSI process and the mold is directly pressed to a thin glass plate using a hot-press machine.  Fabrication of fine grating on a glass surface can be achieved by imprint lithography using a Si3N4/SiO2/Si mold and a low Tg glass. The imprint conditions are designed […]

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